A simple method for sub-100 nm pattern generation with I-line double-patterning technique

Fabrication of sub-100-nm metal-oxide-semiconductor field-effect transistors with asymmetrical source/drain using I-line double patterning technique

Patterning Sub-30-nm MOSFET Gate with -Line Lithography

We have investigated two process techniques: resist ashing and oxide hard mask trimming. A combination of ashing and trimming produces sub-30-nm MOSFET gate. These techniques require neither specific equipment nor materials. These can be used to fabricate experimental devices with line width beyond the limit of optical lithography or high-throughput -beam lithography. They provide 25-nm gate pa...

Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm later...

Performance of the Raith 150 electron-beam lithography system

The performance of a Raith 150 electron-beam lithography system is reported. The system’s resolution, stability, intrafield distortion, stitching, and overlay performance are evaluated. Patterning at lowand high-acceleration voltages is compared. The system was used to pattern sub-20 nm features, and the largest intrafield distortion for a 100 mm field was measured to be 15 nm. Pattern-placemen...

Characterization of the Electric Current Generation Potential of the Pseudomonas aeruginosa Using Glucose, Fructose, and Sucrose in Double Chamber Microbial Fuel Cell

Background: Different concentrations of the simple carbon substrates i.e. glucose, fructose, and sucrose were tested to enhance the performance of the mediator-less double chamber microbial fuel cell (MFC). Objectives: The power generation potential of the different electron donors was studied using a mesophilic Fe (III) reducer and non-fermentative bacteria Pseudomonas aeruginosa</em...